Our high purity electronic grade hexamethyldisilazane (HMDS or HMDZ) used in the electronics industry functions as an excellent adhesion promoter for photoresist resins in the production of semiconductors. This product is critical to the bonding of photoresists to silicon dioxide surfaces.
The silicon wafer that the semiconductor is manufactured upon naturally has some oxide on the surface. Priming with SiVance hexamethyldisilazane allows for better wetting of the resin and prevents the delamination of the photoresist during development and wet etch processing. With the introduction of new porous low k dielectrics, HMDS or HMDZ has found additional use as a dielectric repair treatment for porous low-K after plasma etching.
If you do not see the specific product for your needs, SiVance has the capabilities to custom manufacture silanes and silicones to your exact specifications. Please contact us.